Munich, 22 April 2013 – Linde Electronics, the ball-shaped electronics business of The Linde Group, has strengthened its corporeal support for electronics manufacturing by announcing a strategic partnership with Pelchem, the global fluorochemicals specialist, to accelerate the development of Micro-Electro-Mechanical Systems ( MEMS ) .
MEMS are miniaturised electro-mechanical elements that are widely used in many mobile and automotive applications ( e.g. accelerometers, coerce sensors, compasses, microphones ). MEMS are seen as key build blocks for machine-to-machine ( M2M ) communications which will drive the following semiconductor growth wave .
To satisfy an increased demand for MEMS devices, Linde and Pelchem have formed a strategic partnership to distribute xenon difluoride ( XeF2 ), a critical material used in the manufacture of MEMS. Pelchem has the largest share of the global XeF2 grocery store and Linde ‘s customers include the universe ‘s lead device manufacturers. This agreement enables the companies to take the leash in material supply for the world ‘s MEMS market.

The global MEMS marketplace is set to grow at a CAGR of 13 percentage to 20171, driven largely by advancements in M2M communications. These include biomedical applications where the ability to transport fluids on a microscopic scale will enhance tasks such as drug delivery and blood analysis. M2M communications will form the footing of the internet of things that will further increase the necessitate for MEMS .
“ This partnership is precisely one part of our continue investment in advance materials to facilitate the growth of this market, ” said Peter Owen, Head of Linde ‘s Global Electronics business and Asia Joint Venture Management. “ The addition of XeF2 complements our existing portfolio of gases that help electronics manufacturers globally produce more innovative electronic devices more price effectively. Collaborating with Pelchem enables us to support the manufacture of the latest mem devices as the fast growth of this sector continues. ”
The properties of XeF2 make it ideally suited to the engrave of MEMS silicon and control of this step becomes more crucial as the patterns etched become smaller and more complex. XeF2 is a highly selective and directional etchant of silicon, which enables complex structures to be created promptly, uniformly and at the little sizes required for integration into about any device .
“ Pelchem was the beginning company to supply XeF2 to the electronics industry and we have made extensive investments to meet the needs of the MEMS market, including the administration of the populace ‘s largest XeF2 production implant, ” said Dr Petro Terblanche, Managing Director of Pelchem. “ By joining forces with Linde and tapping into Linde ‘s extensive, first distribution network and infrastructure, we are well positioned to be the supplier of choice for XeF2 on a global scale. ”

About The Linde Group
The Linde Group is a world-leading gases and technology company with around 62,000 employees in more than 100 countries worldwide. In the 2012 fiscal year, Linde generated tax income of EUR 15.280 bn. The strategy of the Group is geared towards long-run profitable growth and focuses on the expansion of its international business with advanced products and services. Linde acts responsibly towards its shareholders, business partners, employees, company and the environment – in every one of its business areas, regions and locations across the earth. The company is committed to technologies and products that unite the goals of customer prize and sustainable development.

For more information, see The Linde Group on-line at

About Pelchem
Pelchem SOC Ltd is the only fluorochemical production, sales and distribution company in the Southern Hemisphere. Pelchem produces 25 fluorochemicals exported to 21 countries on 6 continents. Its products include HF acidic, fluorine accelerator and respective fluorine gas mixtures, NF3 and XeF2. Pelchem has an existing strategic relationship with Linde for the exclusive distribution of NF3 produced by Pelchem since 2008. Pelchem is a State Owned Company in full commercialized in 2007 and is a subsidiary company of the south african Nuclear Energy Corporation .
For more information please see Pelchem online at

Further information:

Sophie Chen
Marketing Communications Manager
Linde Electronics
Phone +86.21.6105.9888-9465
electronic mail : sophie.chen_llh @

1 Status of the MEMS industry report, July 2012, Yole Development

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